Pumping device by non-vaporisable getter and method for using this getter
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United States of America Patent
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Oct 22, 2002
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N/A
app pub date -
Dec 18, 1998
filing date -
Jun 19, 1996
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Abstract
The invention discloses a pumping device by non-vaporizable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterized in that it comprises a thin layer of non-vaporizable getter coated on at least almost the whole metal wall surface defining the chamber.
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