Near field optical microscope and probe for near field optical microscope
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United States of America Patent
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-
Oct 22, 2002
Grant Date -
N/A
app pub date -
May 15, 2000
filing date -
May 17, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A near-field optical microscope comprises an illumination part, a probe, a light detection part, and a scanning part. The illumination part illuminates a sample surface with light. The probe is provided at a position near the sample surface illuminated with the light. The light detection part detects light scattered by the probe. The scanning part scans the sample and a top end of the probe relatively to each, other. The top end of the probe is a top end of an extending part extending in one direction from a body of the probe. In the side of the top end of the extending part, the extending part is at most three times or less as thick as a top end diameter, over a length of a wavelength of the illuminating light. The near-field optical microscope further comprises means for vibrating the probe in a lengthwise direction of the extending part.
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