Buffer layer in flat panel display
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United States of America Patent
Stats
-
Oct 29, 2002
Grant Date -
Jan 31, 2002
app pub date -
Sep 21, 2001
filing date -
Sep 1, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In devices such as flat panel displays, an aluminum oxide layer is provided between an aluminum layer and an ITO layer when such materials would otherwise be in contact to protect the ITO from optical and electrical defects sustained, for instance, during anodic bonding and other fabrication steps. This aluminum oxide barrier layer is preferably formed either by: (1) partially or completely anodizing an aluminum layer formed over the ITO layer, or (2) an in situ process forming aluminum oxide either over the ITO layer or over an aluminum layer formed on the ITO layer. After either of these processes, an aluminum layer is then formed over the aluminum oxide layer.
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