Galvano-mirror and method of making the same
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United States of America Patent
Stats
-
Oct 29, 2002
Grant Date -
May 2, 2002
app pub date -
Mar 12, 2001
filing date -
Nov 2, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.
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