For a semiconductor integrated circuit having an internal booster circuit such as a flash memory, voltage booster circuits capable of generating a boosted voltage 10 times or more as high as a relatively low source voltage is to be realized. Charge pumps for carrying out first stage voltage boosting on the basis of a source voltage are configured of parallel capacity type units, and charge pumps for carrying out second stage voltage boosting on the basis of the boosted voltage generated by the first charge pumps are configured of serial capacity type units.
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