Corrosion-resistant diaphragm pressure sensor
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United States of America Patent
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-
Nov 5, 2002
Grant Date -
N/A
app pub date -
Sep 20, 2000
filing date -
Jul 10, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A diaphragm pressure sensor (1) includes a pressure guide member (3) made of fluoroplastics for the admission of liquid chemicals, pressure of which is measured. A pressure frame (4) made of perfluoroalkoxy resin is integrated with the pressure guide member (3) to form a wetted part 6 of the liquid chemicals. A ceramic diaphragm (8) with built-in pressure sensor (7) is bonded to the surface of the pressure frame (4) opposite to the surface to which pressure is applied. A body (2) is provided for housing the pressure guide member (3), pressure frame (4) and diaphragm (8).
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