Substrate processing apparatus and substrate processing method
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United States of America Patent
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Nov 5, 2002
Grant Date -
N/A
app pub date -
Jul 19, 2000
filing date -
Jul 19, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A substrate which has been subjected to heat processing in any of hot plate units is transferred to a normal cooling unit by a transfer device and subjected to cooling processing to some extent, and then transferred to a high accuracy cooling unit and subjected to cooling processing with high accuracy, and thereafter transferred to any of coating units or a developing units. Thereby, the substrate can be subjected to the cooling processing with high accuracy and thereafter to coating processing with no increase in apparatus cost and with no decrease in throughput.
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