Method of forming a double gate transistor having an epitaxial silicon/germanium channel region

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United States of America Patent

PATENT NO 6475869
SERIAL NO

09793055

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Abstract

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A method of manufacturing an integrated circuit with a channel region containing germanium. The method can provide a double planar gate structure. The gate structure can be provided over lateral sidewalls of channel region. The semiconductor material containing germanium can increase the charge mobility associated with the transistor. An epitaxy process can form the channel region. A silicon-on-insulator can be used.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yu, Bin Sunnyvale, CA 716 18157

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