US Patent No: 6,476,393
Number of patents in Portfolio can not be more than 2000
Surface state monitoring method and apparatus
Stats
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Nov 5, 2002
Issued date -
May 27, 1999
filing date -
09/321,505
serial no -
In Force
status
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Abstract
A surface state monitoring method and apparatus for performing in-situ monitoring of surface states of semiconductor substrates. The apparatus comprises condensing means 30 for condensing infrared radiation to an outer peripheral part of the substrate-to-be-monitored; control means 80 for controlling an incident angle of the infrared radiation condensed by the condensing means 30; condensing means 40 for condensing the infrared radiation which has undergone multiple reflection in the substrate-to-be-monitored; detecting means 50 for detecting the infrared radiation condensed by the infrared radiation condensing means 40, and analyzing means 60 for analyzing the detected infrared radiation detected and measuring contaminants staying on the surfaces of the substrate-to-be-monitored.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,381,234 Method and apparatus for real-time film surface detection for large area wafers | 17 | 1993 | |
| 5,386,121 In situ, non-destructive CVD surface monitor | 10 | 1993 | |
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| 5,910,842 Focused beam spectroscopic ellipsometry method and system | 116 | 1996 | |
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| 5,895,918 Apparatus for and method of performing spectroscopic analysis on an article | 3 | 1998 | |
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| 5,550,374 Methods and apparatus for determining interstitial oxygen content of relatively large diameter silicon crystals by infrared spectroscopy | 2 | 1994 | |
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| 6,310,348 Spectroscopic accessory for examining films and coatings on solid surfaces | 7 | 1999 | |
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| 5,534,698 Solid state surface evaluation methods and devices | 11 | 1994 | |
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| 5,321,264 Method for evaluating surface state of silicon wafer | 8 | 1992 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 5, 2014 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |