Illumination optical apparatus for illuminating a mask, method of manufacturing and using same, and field stop used therein
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United States of America Patent
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Nov 12, 2002
Issued Date -
N/A
app pub date -
Nov 28, 2000
filing date -
Jun 30, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An illumination optical apparatus and method forms a plurality of illumination regions on a first object, and positional relationships between the plurality of illumination regions can be adjusted. An exposure apparatus that includes the illumination optical apparatus can, while moving the first object and a second object in a certain moving direction, effect projection exposure of an image of the first object onto the second object. The plurality of illumination regions can have polygon shapes. A field stop used in the illumination optical apparatus can have an aperture portion with first and second regions, the second region corresponding to an overlap region on the first object, wherein a transmittancy of the second region is smaller than a transmittancy of the first region.
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