Heater lift lead screw for vertical furnaces
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United States of America Patent
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Nov 19, 2002
Grant Date -
N/A
app pub date -
Jan 11, 2002
filing date -
Jan 11, 2002
priority date (Note) -
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Importance
Abstract
A heater lift mechanism with a ball screw linear actuator provides a relatively maintenance free lift mechanism with low starting torque and high positional accuracy. The heater lift mechanism can also be used to move wafer boats in a vertical furnace. The ball screw linear actuator has substantially reduced backlash over a conventional ACME thread lead screw.
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