Quadrant avalanche photodiode time-resolved detection
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United States of America Patent
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Nov 19, 2002
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N/A
app pub date -
Sep 30, 1999
filing date -
Sep 30, 1999
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Abstract
A method and system providing spatial and timing resolution for photoemission microscopy of an integrated circuit. A microscope having an objective lens forming a focal plane is arranged to view the integrated circuit, and an aperture element having an aperture is optically aligned in the back focal plane of the microscope. The aperture element is positioned for viewing a selected area of the integrated circuit. A position-sensitive avalanche photo-diode is optically aligned with the aperture to detect photoemissions when test signals are applied to the integrated circuit.
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