Instruments for analyzing binding assays based on attenuation of light by thin films
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United States of America Patent
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Nov 19, 2002
Grant Date -
N/A
app pub date -
Aug 4, 2000
filing date -
Aug 6, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A modified and improved polarizier ellipsometer allows for improved signal quality and signal to noise performance. This improvement is based on rotating one polarizer relative to the other fixed polarizer to generate AC mode signals related to a thin film under analysis. The AC mode signal may be compared to a background signal and the ratio of sample signal to background signal used to provide a more accurate assessment of film thickness. The normalized AC signal for an unknown thickness may be compared to a standard curve generated for a film of similar optical properties for an exact thickness determination or may be used directly to report a relative thickness value. Other modifications of the improved polarizer ellipsometer of the invention are also described where one or both of the fixed polarizers are removed to improve the signal intensity through reduction of the number of optical components. These modifications are designed to address specific thin film and substrate combinations.
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