System and method for classifying an anomaly

United States of America Patent

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Nov 19, 2002
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Mar 6, 2000
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May 31, 1996

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Abstract

A method and system for generating and managing a knowledgebase for use in identifying anomalies on a manufactured object, such as a semiconductor wafer, includes measures for adding, deleting, and organizing data from the knowledgebase.

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RUDOLPH TECHNOLOGIES INC	ONE RUDOLPH ROAD FLANDERS NJ 07836

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G06K:RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD ....

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Cleavelin, C Rinn	Lubbock, TX	22	1362
Hastings, II Howard V	Lubbock, TX	4	361
Hennessey, A Kathleen	Lubbock, TX	12	1072
Kinikoglu, Pinar	Plano, TX	1	106
Lin, YouLing	Plano, TX	19	1061
Reddy, Rajasekar	Dallas, TX	6	745
Wong, Wan S	Plano, TX	3	356

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System and method for classifying an anomaly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09519678

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PATENT NO	6483938
SERIAL NO	09519678
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09519678

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