System and method for coating substrates with improved capacity and uniformity
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United States of America Patent
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Nov 26, 2002
Grant Date -
N/A
app pub date -
Dec 29, 1999
filing date -
Dec 29, 1999
priority date (Note) -
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Abstract
A system and method for coating substrates. The coating process includes an improved capacity and uniformity through the addition of a second motion component in which the substrates move in a closed path. A major portion of the path is linear and the configuration of the coating machine is such that all substrates follow the same trajectory with respect to the machine during the coating process, resulting in a coating which is substantially the same for all substrates.
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