Gas cluster ion beam smoother apparatus
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United States of America Patent
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Nov 26, 2002
Grant Date -
N/A
app pub date -
Dec 6, 2000
filing date -
Dec 6, 1999
priority date (Note) -
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Abstract
An apparatus for smoothing a surface of a substrate includes an ionizer to form gas cluster particles; a power supply to accelerate the gas cluster particles; a triode/Einzel lens combination assembly to focus the accelerated gas cluster particles; a permanent magnet beam filter; scan plates to irradiate the filtered accelerated gas cluster particles onto a surface of a workpiece situated in a reduced pressure atmosphere chamber; and a substrate loading/unloading mechanism to load and unload the workpiece. The ionizer includes an alignment device wherein the alignment device includes a X/Y translation element and an angular translation element. The substrate loading/unloading mechanism provides a workpiece from a plurality of workpieces onto a holder positioned at a first position within the reduced pressure atmosphere chamber, the first position being substantially parallel to a central axis of a flow of the filtered accelerated gas cluster particles. The substrate loading/unloading mechanism also moves the holder with a workpiece thereon to a second position, the second position being substantially perpendicular to the first position and the central axis of a flow of the filtered accelerated gas cluster particles.
First Claim
Family
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- LUMENTUM OPERATIONS LLC;JDSU OPTICAL CORPORATION
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Bachand, James G | Georgetown, MA | 4 | 72 |
Crawford, Lester G | Boxford, MA | 1 | 71 |
Greer, James A | Andover, MA | 12 | 264 |
Gwinn, Matthew C | Salem, MA | 19 | 335 |
Libby, Bruce K | Groveland, MA | 2 | 105 |
Torti, Richard P | Burlington, MA | 4 | 157 |
Yamada, Isao | Hyogo, JP | 45 | 650 |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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