Pixel cross talk suppression in digital microprinters
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United States of America Patent
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-
Dec 3, 2002
Issued Date -
N/A
app pub date -
Sep 26, 2000
filing date -
Dec 29, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Digital microprinters such as maskless projection lithography systems can be adversely affected by pixel cross talk resulting from coherent interactions between adjacent pixels. Such effects are significantly mitigated by inducing a .pi./2 optical phase shift between adjacent pixels. In one implementation, the printing surface is exposed twice, with the phase shift sign-inverted between exposures so that coherent interaction effects cancel out between the two exposures.
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