Reactor for processing a workpiece using sonic energy
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United States of America Patent
Stats
-
Dec 10, 2002
Grant Date -
Jun 6, 2002
app pub date -
Jul 16, 2001
filing date -
Jan 22, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A system for processing a workpiece includes a base having a bowl or recess for holding a liquid. A process reactor or head holds a workpiece between an upper rotor and a lower rotor. A head lifter lowers the head holding the workpiece into contact with the liquid. Sonic energy is introduced into the liquid and acts on the workpiece to improve processing. The head spins the workpiece during or after contact with the liquid. The upper and lower rotors have side openings for loading and unloading a workpiece into the head. The rotors are axially moveable to align the side openings.
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