Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site
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United States of America Patent
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Dec 17, 2002
Issued Date -
N/A
app pub date -
May 16, 2001
filing date -
May 16, 2000
priority date (Note) -
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Abstract
Method and subsystem are provided for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site utilizing an estimated change in temperature of motors caused when the motors drive the stage according to a number of possible trajectories. The method includes receiving reference data which represent locations of microstructures to be processed at the site, determining a plurality of possible trajectories based on the data, and estimating a change of temperature of motors caused when the motors drive the stage based on each of the possible trajectories. The method also includes determining a substantially optimum trajectory from the possible trajectories wherein positioning accuracy of the stage is maximized by following the substantially optimum trajectory.
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