Topographical electrostatic protection grid for sensors
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United States of America Patent
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Dec 31, 2002
Grant Date -
Apr 25, 2002
app pub date -
Apr 25, 2001
filing date -
Dec 30, 1998
priority date (Note) -
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Abstract
A structure and method for dissipating charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry a gap being formed conformally between adjacent plates and a topographic discharge grid over the underlying dielectric layer and wherein the topographic discharge grid fills at least a portion of the gap between the plates over the dielectric layer and diffuses electrostatic charges at the surface of the integrated circuit.
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