Microsensor for measuring velocity and angular direction of an incoming air stream
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jan 7, 2003
Grant Date -
N/A
app pub date -
Sep 1, 2000
filing date -
Sep 1, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A rugged microsensor assembly is disclosed that measures both the velocity and angular direction of an incoming air stream. The microsensor assembly includes at least two flow sensors, each orientated to measure a different velocity component of the incoming air stream. The velocity components are related by the geometry between the sensors, and the angular direction and velocity of the incoming air stream are determined by examining the measured velocity components. The preferred sensor is a fully passivated thermal differential microanemometer with back contacts, designed to operate in harsh environments.
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