Electron beam irradiation process and an object irradiated with an electron beam
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United States of America Patent
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Jan 7, 2003
Grant Date -
Oct 3, 2002
app pub date -
Dec 6, 2000
filing date -
Sep 4, 1996
priority date (Note) -
Expired
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Abstract
A process of accelerating electrons with a voltage applied thereto in a vacuum, guiding the accelerated electrons into a normal-pressure atmosphere, and irradiating the electron beam (EB) onto an object. The electron beam irradiation process uses a vacuum tube-type electron beam irradiation apparatus, and with the acceleration voltage for generating an electron beam set at a value smaller than 100 kV, the electron beam is irradiated onto the object.
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