Application of variable bias voltage on a cylindrical grid enclosing a target
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jan 7, 2003
Grant Date -
N/A
app pub date -
Nov 30, 2000
filing date -
Nov 30, 2000
priority date (Note) -
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Abstract
An apparatus and methods for modifying a surface of a target. The apparatus includes a reaction vessel having a reaction chamber. A cylindrical or spherical grid is positioned within the chamber. An electrode is also positioned within the chamber. A target can be positioned within the chamber and within the grid. A voltage source is operatively associated with the target and with the grid to separately but concurrently provide an independently variable voltage to both the grid and the electrode.
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