Capacitive pressure sensing with moving dielectric
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jan 14, 2003
Grant Date -
N/A
app pub date -
Jan 6, 2000
filing date -
Jan 6, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A pressure sensor with a diaphragm that has a dielectric portion that moves in a cavity near capacitor plates that are fixed relative to a mounting frame. The diaphragm is supported on the frame and the frame surrounds the cavity. The diaphragm has an outer surface that receives pressure and has an inner surface facing the cavity. The capacitor plates, which are fixed, sense movement of the nearby dielectric portion and generate an electrical output representative of pressure. Creep of metallizations on a flexible diaphragm are avoided. Manufacture is simplified because metallization of the diaphragm is avoided.
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