Apparatus for storing and moving a cassette
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jan 14, 2003
Grant Date -
N/A
app pub date -
Mar 16, 2000
filing date -
Mar 16, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.
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