Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
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United States of America Patent
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Jan 14, 2003
Issued Date -
N/A
app pub date -
Jul 11, 2000
filing date -
Jun 24, 1999
priority date (Note) -
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Abstract
A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.
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