Substrate processing system and substrate processing method
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United States of America Patent
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-
Jan 14, 2003
Grant Date -
Dec 13, 2001
app pub date -
Jun 6, 2001
filing date -
Jun 7, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A system for successively extracting unprocessed substrates from a cassette, successively conveying the extracted substrates to a plurality of processing units, causing the processing units to process the substrates, and successively returning processed substrates to a cassette is disclosed. In the system, corresponding to a recipe that contains process conditions for each of at least one lot, a process start prediction time at which processes of each lot start and a process completion prediction time at which processes for each lot are completed are calculated for at least two processes. Corresponding to the process start prediction time and the process completion prediction time, at least one of optimum processing units that optimize processes for each lot is selected for each lot.
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