Reactor for processing a workpiece using sonic energy
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United States of America Patent
Stats
-
Jan 28, 2003
Grant Date -
Feb 21, 2002
app pub date -
Jul 16, 2001
filing date -
Jan 22, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A system for processing a workpiece includes a base having a bowl or recess for holding a liquid. A sonic energy source, such as a megasonic transducer, provides sonic energy into a liquid in the bowl. A process reactor or head holds a workpiece between an upper rotor and a lower rotor. A head lifter lowers the head holding the workpiece into the liquid. Sonic energy is provided to the workpiece through the liquid, optionally while the head spins the workpiece. The liquid may include de-ionized water and an etchant.
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