Probe station thermal chuck with shielding for capacitive current
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United States of America Patent
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-
Jan 28, 2003
Grant Date -
Nov 14, 2002
app pub date -
Jun 24, 2002
filing date -
Jun 30, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.
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