Micro-mirrors with variable focal length, and optical components comprising micro-mirrors
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United States of America Patent
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Feb 4, 2003
Grant Date -
N/A
app pub date -
Mar 18, 2002
filing date -
Mar 18, 2002
priority date (Note) -
Expired
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Abstract
A micro-mirror comprises a membrane of a dielectric polymer layer between two metal layers for supplying a high frequency ac voltage thereto for dielectric heating of the membrane, and a further polymer layer adjacent to and forming a bimorph with the second metal layer, the membrane being supported around its periphery so that the membrane produces a mirror with a curvature, and hence a focal length, dependent upon the heating. Such micro-mirrors are useful in optical signal paths in optical components, including optical receivers and variable attenuators. A detected optical signal can be used in a feedback control path to control a high frequency ac voltage source connected to the two metal layers, and hence the focal length of the micro-mirror.
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