Substrate transfer system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Feb 4, 2003
Grant Date -
N/A
app pub date -
Oct 12, 2000
filing date -
Feb 1, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate transfer system employs a robot hand which is composed such that a sum length of a first arm and a third arm equal a length of a second arm, and a length of the first arm becomes longer than a length of the third arm. A ratio between arm lengths is determined such that a distal end portion of the first arm, a distal end portion of the second arm, a distal end portion of the third arm, and a distal end portion of the workpiece held by the end effector are inscribed in a track circle around a rotational axis of the first arm as a center. The ratio of the first, second and third arm lengths is approximately 1:( 5+1)/2:( 5-1)/2. This optimized ratio of the arm lengths allows the arm rotational radius to be smaller than the conventional value, and makes it possible to achieve a longer transfer distance in an equal installation area.
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