Conditioner set for chemical-mechanical polishing station
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United States of America Patent
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-
Feb 4, 2003
Grant Date -
May 30, 2002
app pub date -
Nov 30, 2000
filing date -
Nov 30, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A multi-functional conditioner set for a chemical-mechanical polishing station. The multi-functional conditioner set has at least two conditioning heads each made from a different material such as diamond dust and nylon. The multi-functional conditioner set also includes an ejection tube for delivering chemical agents and de-ionized water to the conditioning heads. Moreover, a vibrator is attached to the ejection tube to transmit ultrasonic or megasonic vibration to the chemical agents and de-ionized water. The conditioning heads can be arranged in various combinations and the ejection tube set to various control settings. Hence, a polishing pad can be cleaned or reconditioned and residual diamond particles on the polishing pad can be removed. Furthermore, the conditioner set occupies only a single area above the polishing table of the polishing station.
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