Coating apparatus
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United States of America Patent
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Feb 4, 2003
Grant Date -
N/A
app pub date -
Sep 22, 2000
filing date -
Oct 1, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A nozzle provided with a plurality of discharge apertures in line for discharging a resist solution as a coating solution toward a top surface of a substrate G held by a holding plate is provided at a lower portion of a main body of a coating head. The resist solution is simultaneously discharged from the plurality of discharge apertures while the nozzle is scan-moved in a direction orthogonal to an arranging direction of the discharge apertures. With the above configuration, the disadvantage of the coating solution dropping or the like is eliminated, the waste of the coating solution is avoided, and in addition, the time taken to perform coating processing is reduced.
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