Film forming unit
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 4, 2003
Grant Date -
Jun 21, 2001
app pub date -
Dec 14, 2000
filing date -
Dec 16, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention is a film forming unit for forming a film on a substrate by supplying a coating solution on the substrate from a discharge nozzle, including moving means for moving the discharge nozzle, wherein the moving means comprises a supporting member for supporting the discharge nozzle, a moving member for moving the supporting member, a guide shaft passing through bearing portion which is formed in the supporting member, and an air supply mechanism for supplying air to a space between the bearing portion and the guide shaft. The discharge nozzle discharges the coating solution while moving along the guide shaft. On the substrate the coating solution is applied along the locus of the discharge nozzle movement. Since air is supplied to the space between the bearing portion and the guide shaft, the supporting member can be made to be in the state of floating relative the guide shaft. As a result, even if the discharge nozzle moves at high speed, the discharge of the coating solution is prevented from being disturbed so that the predetermined coating of the coating solution is performed precisely.
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Family
International Classification(s)
Cited Art Landscape
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