Illumination device and optical processing apparatus using the same

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United States of America Patent

PATENT NO 6515694
SERIAL NO

09565478

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An illumination system for illuminating a particular surface, to be illuminated, with light from a light source, includes a first optical component having an optical power with respect to a predetermined plane, and a second optical component having an optical power with respect to the predetermined plane, wherein the particular surface is illuminated through Koehler illumination with respect to a plane orthogonal to the predetermined plane and is illuminated approximately through critical illumination with respect to the predetermined plane, wherein the first and second optical components are adapted to provide an afocal system, and wherein the condition for the afocal system is disconnected when a relative position between the first and second optical components is changed, whereby an illumination range with respect to the predetermined plane, upon the particular surface, is changed.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishiwaki, Masayuki Yoshikawa, JP 18 261

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