Substrate transfer shuttle
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United States of America Patent
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Feb 11, 2003
Grant Date -
N/A
app pub date -
May 20, 1998
filing date -
May 20, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.
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