Substrate temperature control system and method for controlling temperature of substrate
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United States of America Patent
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Feb 11, 2003
Issued Date -
N/A
app pub date -
Feb 28, 2002
filing date -
Apr 2, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
So as to provide a substrate temperature control system capable of unifying the temperature of the substrate and capable of shortening the temperature elevation time (temperature lowering time), the substrate temperature control system is equipped with a temperature control plate (heating or cooling plate) having a plurality of projections on the surface and serving to set the temperature of the substrate, and a chuck mechanism to fix the substrate in contact to a plurality of the projections by chucking the substrate toward the direction of the temperature control plate.
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