Gas spectrochemical analyzer, and spectrochemical analyzing method
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United States of America Patent
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Feb 11, 2003
Grant Date -
N/A
app pub date -
Nov 12, 1999
filing date -
Mar 11, 1998
priority date (Note) -
Expired
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Abstract
A gas spectroscopic analysis device for analyzing a trace impurity in a sample gas by obtaining the second derivative spectrum of the light absorption intensity by passing frequency modulated diode laser light through a low-pressure sample gas is provided with a modulation amplitude calculating device (1) for controlling the modulation amplitude of the laser light in accordance with the characteristics of diode laser (11); a spectrum calculating device (2) for calculating the peak absorption intensity and the wavelength interval between the minimum values on the left and right hand of the peak in the second derivative spectrum obtained by measurement; and a pressure adjusting device (3) for controlling the pressure inside measuring gas-cell (14) so that the value of the absorption intensity obtained at spectrum calculating device (2) becomes maximal. The optimal value of the modulation amplitude of the laser light is set so that the wavelength interval between the minimum values on the left and right hand of the peak in the second derivative spectrum is 0.0116 nm. The measurement pressure is optimized by setting the modulation amplitude to an optimal value.
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