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Abstract

A method and apparatus for modulating an optical signal using a micromechanical modulator are disclosed. The modulator comprises a membrane, which includes a first and a second layer, a substrate layer, and a substrate, spaced from the membrane to form an air gap. The layers of the membrane are characterized in that there is a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. Bias is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal. In a preferred embodiment, the thickness of the first and second layers of the membrane are approximately equal to one-third and one-tenth, respectively, of a wavelength of the optical signal, as measured within the first and second layers, respectively. The thickness of the substrate layer is approximately equal to one-seventh of the wavelength of the optical signal, as measured within the substrate layer.

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First Claim