Method and apparatus for a direct bonded isolated pressure sensor
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United States of America Patent
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Feb 18, 2003
Grant Date -
N/A
app pub date -
Jan 6, 2000
filing date -
Jan 6, 2000
priority date (Note) -
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Abstract
A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
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