Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 18, 2003
Grant Date -
N/A
app pub date -
Oct 10, 2000
filing date -
Oct 10, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully