High pressure piezoresistive transducer suitable for use in hostile environments and method for making the same
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United States of America Patent
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Feb 25, 2003
Issued Date -
N/A
app pub date -
Aug 6, 2001
filing date -
Feb 4, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A pressure transducer including: a silicon substrate including: a first surface adapted for receiving a pressure applied thereto, an oppositely disposed second surface, and a flexing portion adapted to deflect when pressure is applied to the first surface; at least a first sensor formed on the second surface and adjacent to a center of the flexing portion, and adapted to measure the pressure applied to the first surface; at least a second gauge sensor formed on the second surface and adjacent to a periphery of the flexing portion, and adapted to measure the pressure applied to the first surface; a glass substrate secured to the second surface of the silicon wafer.
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