Method and system for imaging an object with a plurality of optical beams
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United States of America Patent
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Feb 25, 2003
Grant Date -
Sep 13, 2001
app pub date -
Jan 16, 2001
filing date -
Jun 10, 1998
priority date (Note) -
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Abstract
A diffracting beam splitter splits an optical beam. The resulting beams are swept over an object by a beam deflector. The beams are mechanically scanned transverse to the beam deflection direction. A position sensitive device receives light reflected from the incident beams and a three dimensional profile of the object is produced.
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