Process for producing membrane for capacitive vacuum measuring cell
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United States of America Patent
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Mar 4, 2003
Grant Date -
N/A
app pub date -
Dec 22, 1998
filing date -
Dec 23, 1997
priority date (Note) -
Expired
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Abstract
A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 .mu.m, in particular less than 120 .mu.m. The membrane is produced from a ribbon-shaped green body of Al.sub.2 O.sub.3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.
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