Importance

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Abstract

A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.

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First Claim