MEMS-based spatial-light modulator with integrated electronics
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United States of America Patent
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Mar 4, 2003
Grant Date -
N/A
app pub date -
Oct 30, 2000
filing date -
Oct 28, 1999
priority date (Note) -
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Abstract
Method and apparatus for forming an array of reflective elements for spatial light modulation. The array includes a substrate supporting electronically addressable actuators, each associated with a corresponding reflective element, a coupling attaching each actuator to the corresponding reflective element to place each reflective element in a substantially planar surface. Each electronically addressable actuator responds to predetermined addressing from a processing circuit to reposition the corresponding reflective element out of the planar surface a predetermined distance identified in the predetermined electronic addressing.
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