SMIF load port interface including smart port door
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 11, 2003
Grant Date -
Jan 16, 2003
app pub date -
Jul 13, 2001
filing date -
Jul 13, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A SMIF load port assembly is disclosed including a port door position compensation assembly capable of dynamically adjusting a relative spacing between a front surface of a port door and a front surface of a pod door loaded onto the load port assembly so as to compensate for any improper positioning of the front surface of the pod. The position compensation assembly includes a plunger translationally mounted in the port door, and a sensor for detecting a position of the plunger. As a pod is loaded onto the load port assembly is advanced toward the port door, the front surface of the pod door contacts the plunger at which point the position compensation assembly in combination with an overall controller can identify the exact position of the pod door. From this identification, the position of the port and/or pod doors may be adjusted to compensate for any improper positioning of the front surface of the pod door on the load port assembly.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully