Ink jet recording head, substrate for this head, manufacturing method of this substrate and ink jet recording apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 11, 2003
Grant Date -
Sep 26, 2002
app pub date -
Dec 15, 1998
filing date -
Dec 18, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An ink jet recording head in which a heating resistor forming a heating portion, a wiring electrically connected to the heating resistor, and a protective film formed on the heating resistor and the wiring to protect the heating resistor and the wiring are arranged on a substrate for the ink jet recording head. An ink path in communication with a discharging port for discharging ink is also formed on the substrate for the ink jet recording head. The protective film includes a first protective film layer for covering the heating resistor and the wiring, a second protective film layer formed on the first protective film layer by a material different from that of the first protective film layer and having an opening in a portion corresponding to the heating portion of the heating resistor, and a third protective film layer constructed of the same material system as the first protective film layer and covering the second protective film layer and the portion of the first protective film layer that is exposed through the opening. The second protective film layer is constructed of an inorganic material.
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Family
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Cited Art Landscape
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