Integrated substrate handler having pre-aligner and storage pod access mechanism
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 18, 2003
Issued Date -
N/A
app pub date -
Mar 29, 2001
filing date -
Mar 29, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Access to the interior of a substrate storage pod in which substrates such as semiconductor wafers are stored is gained using an access device provided within a micro environment enclosure. The access device has a telescoping enclosure door which serves to control access to the interior of the storage pod from the interior of the enclosure. A pre-aligner is mounted to the enclosure door, and substrates are passed through the pre-aligner as they are retrieved from the storage pod. The pre-aligner detects and adjusts the orientation of the substrates as necessary for processing. The level of the pre-aligner is incrementally adjusted to match that of a current substrate by incrementally adjusting the level of the enclosure door.
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