Heat treatment unit and heat treatment method
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United States of America Patent
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Mar 18, 2003
Grant Date -
N/A
app pub date -
Sep 29, 2000
filing date -
Sep 30, 1999
priority date (Note) -
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Abstract
A heat treatment unit comprises a heat plate made of aluminum nitride which is excellent in heat conductivity and strength inside thereof. The entire circumference of the heat plate is supported by a supporting member which is excellent in thermal insulation. The heat treatment unit is equipped with a nozzle for blowing dry air against the reverse side of the heat plate. When a temperature of the heat plate is lowered, the dry air is blown from the nozzle, thereby quickly lowering the temperature of the heat plate.
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